Evaluation of Squeeze-film Damping Effects in MEMS Perforated Plates
نویسندگان
چکیده
In this paper, analytical and numerical methods for simulating squeeze-film air damping affecting suspended and perforated movable micro-surfaces are analyzed. Numerical solutions are obtained by full 3-D Navier-Stokes numerical analysis, carried out by a commercial finite element code, COMSOL Multiphysics, and are compared with those obtained using different analytical models proposed in literature. The numerical and analytical solutions are also compared with published experimental measurements. Investigated cases are experimentally studied rectangular plates, which differ from one another for the size, the number and the position of perforations. Key-Words: Squeeze-film damping, MEMS, Navier-Stokes equation, FEA, COMSOL Multiphysics
منابع مشابه
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration
Squeeze-film effects of perforated plates for small amplitude vibration are analyzed through modified Reynolds equation (MRE). The analytical analysis reckons in most important influential factors: compressibility of the air, border effects, and the resistance caused by vertical air flow passing through perforated holes. It is found that consideration of air compressibility is necessary for hig...
متن کاملAn Analytical Model for Squeeze-Film Damping of Perforated Torsional Microplates Resonators
Squeeze-film damping plays a significant role in the performance of micro-resonators because it determines their quality factors. Perforations in microstructures are often used to control the squeeze-film damping in micro-resonators. To model the perforation effects on the squeeze-film damping, many analytical models have been proposed, however, most of the previous models have been concerned w...
متن کاملDynamic and Static Pull-in instability of electrostatically actuated nano/micro membranes under the effects of Casimir force and squeezed film damping
In the current study, the effects of Casimir force and squeeze film damping on pull-in instability and dynamic behavior of electrostatically actuated nano and micro electromechanical systems are investigated separately. Linear elastic membrane theory is used to model the static and dynamic behavior of the system for strip, annular and disk geometries. Squeeze film damping is modeled using nonli...
متن کاملIdentification of Test Structures for Reduced Order Modeling of the Squeeze Film Damping in Mems
In this study the dynamic behaviour of perforated microplates oscillating under the effect of squeeze film damping is analyzed. A numerical approach is adopted to predict the effects of damping and stiffness transferred from the surrounding ambient air to oscillating structures; the effect of hole’s cross section and plate’s extension is observed. Results obtained by F.E.M. models are compared ...
متن کاملViscous damping of perforated planar micromechanical structures.
The paper gives an analytical approximation to the viscous damping coefficient due to the motion of a gas between a pair of closely spaced fluctuating plates in which one of the plates contains a regular system of circular holes. These types of structures are important parts of many microelectromechanical devices realized in MEMS technology as microphones, microaccelerometers, resonators, etc.T...
متن کامل